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Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601
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10.1116/1.590405
/content/avs/journal/jvstb/16/6/10.1116/1.590405
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590405
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/content/avs/journal/jvstb/16/6/10.1116/1.590405
1998-11-01
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590405
10.1116/1.590405
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