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Nanometer scattered-light alignment system using SiC x-ray masks with low optical transparency
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10.1116/1.590479
/content/avs/journal/jvstb/16/6/10.1116/1.590479
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590479
/content/avs/journal/jvstb/16/6/10.1116/1.590479
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/content/avs/journal/jvstb/16/6/10.1116/1.590479
1998-11-01
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanometer scattered-light alignment system using SiC x-ray masks with low optical transparency
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590479
10.1116/1.590479
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