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130 nm and 150 nm line-and-space critical-dimension control evaluation using XS-1 x-ray stepper
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10.1116/1.590487
/content/avs/journal/jvstb/16/6/10.1116/1.590487
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590487
/content/avs/journal/jvstb/16/6/10.1116/1.590487
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/content/avs/journal/jvstb/16/6/10.1116/1.590487
1998-11-01
2014-09-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: 130 nm and 150 nm line-and-space critical-dimension control evaluation using XS-1 x-ray stepper
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590487
10.1116/1.590487
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