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Nanolithography in polymethylmethacrylate: An atomic force microscope study
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10.1116/1.590501
/content/avs/journal/jvstb/16/6/10.1116/1.590501
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590501
/content/avs/journal/jvstb/16/6/10.1116/1.590501
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/content/avs/journal/jvstb/16/6/10.1116/1.590501
1998-11-01
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanolithography in polymethylmethacrylate: An atomic force microscope study
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590501
10.1116/1.590501
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