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Model for etch depth dependence on GaAs via hole diameter
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10.1116/1.590677
/content/avs/journal/jvstb/17/3/10.1116/1.590677
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/3/10.1116/1.590677
/content/avs/journal/jvstb/17/3/10.1116/1.590677
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/content/avs/journal/jvstb/17/3/10.1116/1.590677
1999-05-01
2015-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Model for etch depth dependence on GaAs via hole diameter
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/3/10.1116/1.590677
10.1116/1.590677
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