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Spectroscopic ellipsometry investigation of silicide formation by rapid thermal process
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10.1116/1.590905
/content/avs/journal/jvstb/17/5/10.1116/1.590905
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/5/10.1116/1.590905
/content/avs/journal/jvstb/17/5/10.1116/1.590905
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/content/avs/journal/jvstb/17/5/10.1116/1.590905
1999-09-01
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic ellipsometry investigation of silicide formation by rapid thermal process
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/5/10.1116/1.590905
10.1116/1.590905
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