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Extension of x-ray lithography to 50 nm with a harder spectrum
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10.1116/1.591024
/content/avs/journal/jvstb/17/6/10.1116/1.591024
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591024
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/content/avs/journal/jvstb/17/6/10.1116/1.591024
1999-11-01
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Extension of x-ray lithography to 50 nm with a harder spectrum
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591024
10.1116/1.591024
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