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X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances
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10.1116/1.591026
/content/avs/journal/jvstb/17/6/10.1116/1.591026
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591026
/content/avs/journal/jvstb/17/6/10.1116/1.591026
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/content/avs/journal/jvstb/17/6/10.1116/1.591026
1999-11-01
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591026
10.1116/1.591026
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