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Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources
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10.1116/1.591067
/content/avs/journal/jvstb/17/6/10.1116/1.591067
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591067
/content/avs/journal/jvstb/17/6/10.1116/1.591067
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/content/avs/journal/jvstb/17/6/10.1116/1.591067
1999-11-01
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/17/6/10.1116/1.591067
10.1116/1.591067
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