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Low-permittivity nanocomposite materials using sculptured thin film technology
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10.1116/1.591146
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    Affiliations:
    1 Computational and Theoretical Materials Sciences (CATMAS) Group, Department of Engineering Science and Mechanics, Pennsylvania State University, University Park, Pennsylvania 16802-1401
    2 Computational and Theoretical Materials Sciences (CATMAS) Group, Department of Engineering Science and Mechanics and Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802-1401
    3 Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802
    J. Vac. Sci. Technol. B 18, 32 (2000); http://dx.doi.org/10.1116/1.591146
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2000-01-01
2014-09-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low-permittivity nanocomposite materials using sculptured thin film technology
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/1/10.1116/1.591146
10.1116/1.591146
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