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Effects of molecular properties on nanolithography in polymethyl methacrylate
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10.1116/1.591242
/content/avs/journal/jvstb/18/1/10.1116/1.591242
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/1/10.1116/1.591242
/content/avs/journal/jvstb/18/1/10.1116/1.591242
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/content/avs/journal/jvstb/18/1/10.1116/1.591242
2000-01-01
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of molecular properties on nanolithography in polymethyl methacrylate
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/1/10.1116/1.591242
10.1116/1.591242
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