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Process development of gated field emitter arrays with dry etched amorphous silicon microtips on glass substrates
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10.1116/1.591312
/content/avs/journal/jvstb/18/2/10.1116/1.591312
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/2/10.1116/1.591312
/content/avs/journal/jvstb/18/2/10.1116/1.591312
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/content/avs/journal/jvstb/18/2/10.1116/1.591312
2000-03-01
2015-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Process development of gated field emitter arrays with dry etched amorphous silicon microtips on glass substrates
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/2/10.1116/1.591312
10.1116/1.591312
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