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Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor–dielectric interfaces and (ii) internal interfaces in stacked dielectrics
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10.1116/1.1306307
/content/avs/journal/jvstb/18/4/10.1116/1.1306307
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/4/10.1116/1.1306307
/content/avs/journal/jvstb/18/4/10.1116/1.1306307
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/content/avs/journal/jvstb/18/4/10.1116/1.1306307
2000-07-01
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor–dielectric interfaces and (ii) internal interfaces in stacked dielectrics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/4/10.1116/1.1306307
10.1116/1.1306307
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