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The effect of photoacid generator structure on deep ultraviolet resist performance
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10.1116/1.1288136
/content/avs/journal/jvstb/18/5/10.1116/1.1288136
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/5/10.1116/1.1288136
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/content/avs/journal/jvstb/18/5/10.1116/1.1288136
2000-09-01
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effect of photoacid generator structure on deep ultraviolet resist performance
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/18/5/10.1116/1.1288136
10.1116/1.1288136
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