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Level set approach to simulation of feature profile evolution in a high-density plasma-etching system
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10.1116/1.1370174
/content/avs/journal/jvstb/19/3/10.1116/1.1370174
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/3/10.1116/1.1370174
/content/avs/journal/jvstb/19/3/10.1116/1.1370174
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/content/avs/journal/jvstb/19/3/10.1116/1.1370174
2001-05-01
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Level set approach to simulation of feature profile evolution in a high-density plasma-etching system
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/3/10.1116/1.1370174
10.1116/1.1370174
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