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Comparison of the effective oxide thickness determined by ellipsometry with the result by medium energy ion scattering spectroscopy and high-resolution transmission electron microscopy
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10.1116/1.1379799
/content/avs/journal/jvstb/19/4/10.1116/1.1379799
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/4/10.1116/1.1379799
/content/avs/journal/jvstb/19/4/10.1116/1.1379799
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/content/avs/journal/jvstb/19/4/10.1116/1.1379799
2001-07-01
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison of the effective oxide thickness determined by ellipsometry with the result by medium energy ion scattering spectroscopy and high-resolution transmission electron microscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/4/10.1116/1.1379799
10.1116/1.1379799
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