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Silicon V grooves fabricated using etch mask prepared by room-temperature magnetron sputtering
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10.1116/1.1381067
/content/avs/journal/jvstb/19/4/10.1116/1.1381067
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/4/10.1116/1.1381067
/content/avs/journal/jvstb/19/4/10.1116/1.1381067
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/content/avs/journal/jvstb/19/4/10.1116/1.1381067
2001-07-01
2014-11-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon V grooves fabricated using Ta2O5 etch mask prepared by room-temperature magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/4/10.1116/1.1381067
10.1116/1.1381067
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