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Patterning-induced image placement distortions on electron beam projection lithography membrane masks
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10.1116/1.1409381
/content/avs/journal/jvstb/19/6/10.1116/1.1409381
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/6/10.1116/1.1409381
/content/avs/journal/jvstb/19/6/10.1116/1.1409381
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/content/avs/journal/jvstb/19/6/10.1116/1.1409381
2001-11-01
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Patterning-induced image placement distortions on electron beam projection lithography membrane masks
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/6/10.1116/1.1409381
10.1116/1.1409381
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