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Processing and characterization of ultralow-dielectric constant organosilicate
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10.1116/1.1417542
/content/avs/journal/jvstb/19/6/10.1116/1.1417542
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/6/10.1116/1.1417542
/content/avs/journal/jvstb/19/6/10.1116/1.1417542
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/content/avs/journal/jvstb/19/6/10.1116/1.1417542
2001-11-01
2014-12-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Processing and characterization of ultralow-dielectric constant organosilicate
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/19/6/10.1116/1.1417542
10.1116/1.1417542
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