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Fabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices
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10.1116/1.1428279
/content/avs/journal/jvstb/20/1/10.1116/1.1428279
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/1/10.1116/1.1428279
/content/avs/journal/jvstb/20/1/10.1116/1.1428279
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/content/avs/journal/jvstb/20/1/10.1116/1.1428279
2002-01-01
2015-04-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/1/10.1116/1.1428279
10.1116/1.1428279
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