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Molecular dynamics simulation of sputter trench-filling morphology in damascene process
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10.1116/1.1477423
/content/avs/journal/jvstb/20/3/10.1116/1.1477423
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/3/10.1116/1.1477423
/content/avs/journal/jvstb/20/3/10.1116/1.1477423
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/content/avs/journal/jvstb/20/3/10.1116/1.1477423
2002-06-05
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Molecular dynamics simulation of sputter trench-filling morphology in damascene process
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/3/10.1116/1.1477423
10.1116/1.1477423
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