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Etching method for fabricating ultracompact three-dimensional monolithic microwave integrated circuits
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10.1116/1.1479362
/content/avs/journal/jvstb/20/3/10.1116/1.1479362
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/3/10.1116/1.1479362
/content/avs/journal/jvstb/20/3/10.1116/1.1479362
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/content/avs/journal/jvstb/20/3/10.1116/1.1479362
2002-06-05
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Etching method for fabricating ultracompact three-dimensional monolithic microwave integrated circuits
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/3/10.1116/1.1479362
10.1116/1.1479362
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