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Impact of the colloidal silica particle size on physical vapor deposition tungsten removal rate and surface roughness
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10.1116/1.1490393
/content/avs/journal/jvstb/20/4/10.1116/1.1490393
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/4/10.1116/1.1490393
/content/avs/journal/jvstb/20/4/10.1116/1.1490393
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/content/avs/journal/jvstb/20/4/10.1116/1.1490393
2002-08-06
2014-07-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of the colloidal silica particle size on physical vapor deposition tungsten removal rate and surface roughness
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/4/10.1116/1.1490393
10.1116/1.1490393
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