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Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
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10.1116/1.1501583
/content/avs/journal/jvstb/20/5/10.1116/1.1501583
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/5/10.1116/1.1501583
/content/avs/journal/jvstb/20/5/10.1116/1.1501583
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/content/avs/journal/jvstb/20/5/10.1116/1.1501583
2002-10-04
2015-07-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/5/10.1116/1.1501583
10.1116/1.1501583
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