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Evolution of electron projection optics from variable axis immersion lenses to projection reduction exposure with variable axis immersion lenses
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10.1116/1.1515303
/content/avs/journal/jvstb/20/6/10.1116/1.1515303
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/6/10.1116/1.1515303
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/content/avs/journal/jvstb/20/6/10.1116/1.1515303
2002-12-09
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of electron projection optics from variable axis immersion lenses to projection reduction exposure with variable axis immersion lenses
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/6/10.1116/1.1515303
10.1116/1.1515303
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