1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics
Rent:
Rent this article for
USD
10.1116/1.1524153
/content/avs/journal/jvstb/20/6/10.1116/1.1524153
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/6/10.1116/1.1524153
/content/avs/journal/jvstb/20/6/10.1116/1.1524153
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvstb/20/6/10.1116/1.1524153
2002-12-09
2014-09-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/20/6/10.1116/1.1524153
10.1116/1.1524153
SEARCH_EXPAND_ITEM