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Physical and electrical properties of metal gate electrodes on gate dielectrics
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10.1116/1.1529650
/content/avs/journal/jvstb/21/1/10.1116/1.1529650
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/1/10.1116/1.1529650
/content/avs/journal/jvstb/21/1/10.1116/1.1529650
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/content/avs/journal/jvstb/21/1/10.1116/1.1529650
2002-12-16
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Physical and electrical properties of metal gate electrodes on HfO2 gate dielectrics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/1/10.1116/1.1529650
10.1116/1.1529650
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