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Large-area patterning of nm structures on flexible substrates using near-field 193 nm radiation
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10.1116/1.1532024
/content/avs/journal/jvstb/21/1/10.1116/1.1532024
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/1/10.1116/1.1532024
/content/avs/journal/jvstb/21/1/10.1116/1.1532024
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/content/avs/journal/jvstb/21/1/10.1116/1.1532024
2002-12-23
2014-12-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large-area patterning of ∼50  nm structures on flexible substrates using near-field 193 nm radiation
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/1/10.1116/1.1532024
10.1116/1.1532024
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