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SiC/Si-dots multilayer structures formed by supersonic free jets of and
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10.1116/1.1617280
/content/avs/journal/jvstb/21/6/10.1116/1.1617280
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1617280
/content/avs/journal/jvstb/21/6/10.1116/1.1617280
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/content/avs/journal/jvstb/21/6/10.1116/1.1617280
2003-11-25
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: SiC/Si-dots multilayer structures formed by supersonic free jets of CH3SiH3 and Si3H8
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1617280
10.1116/1.1617280
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