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Fabrication of subwavelength surface structures combining self-assembled masking layer with plasma etching techniques
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10.1116/1.1617281
/content/avs/journal/jvstb/21/6/10.1116/1.1617281
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1617281
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/content/avs/journal/jvstb/21/6/10.1116/1.1617281
2003-11-25
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of subwavelength surface structures combining self-assembled masking layer with plasma etching techniques
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1617281
10.1116/1.1617281
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