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Positive charge effect in atomic force microscope anodization lithography using self-assembled monolayers of metal phosphate as resists
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10.1116/1.1623510
/content/avs/journal/jvstb/21/6/10.1116/1.1623510
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1623510
/content/avs/journal/jvstb/21/6/10.1116/1.1623510
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/content/avs/journal/jvstb/21/6/10.1116/1.1623510
2003-11-24
2014-07-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Positive charge effect in atomic force microscope anodization lithography using self-assembled monolayers of metal phosphate as resists
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1623510
10.1116/1.1623510
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