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Line edge roughness of sub-100 nm dense and isolated features: Experimental study
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10.1116/1.1624254
/content/avs/journal/jvstb/21/6/10.1116/1.1624254
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1624254
/content/avs/journal/jvstb/21/6/10.1116/1.1624254
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/content/avs/journal/jvstb/21/6/10.1116/1.1624254
2003-12-10
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Line edge roughness of sub-100 nm dense and isolated features: Experimental study
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/21/6/10.1116/1.1624254
10.1116/1.1624254
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