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Compositional effects on electrical and mechanical properties in carbon-doped oxide dielectric films: Application of Fourier-transform infrared spectroscopy
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10.1116/1.1640401
/content/avs/journal/jvstb/22/1/10.1116/1.1640401
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/1/10.1116/1.1640401
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/content/avs/journal/jvstb/22/1/10.1116/1.1640401
2004-01-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Compositional effects on electrical and mechanical properties in carbon-doped oxide dielectric films: Application of Fourier-transform infrared spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/1/10.1116/1.1640401
10.1116/1.1640401
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