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Recovery of dry-etch-induced surface damage on Mg-doped GaN by ambient thermal annealing
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10.1116/1.1645882
/content/avs/journal/jvstb/22/2/10.1116/1.1645882
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/2/10.1116/1.1645882
/content/avs/journal/jvstb/22/2/10.1116/1.1645882
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/content/avs/journal/jvstb/22/2/10.1116/1.1645882
2004-02-12
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Recovery of dry-etch-induced surface damage on Mg-doped GaN by NH3 ambient thermal annealing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/2/10.1116/1.1645882
10.1116/1.1645882
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