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Microelectron field emitter array with focus lenses for multielectron beam lithography based on silicon on insulator wafer
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10.1116/1.1738118
/content/avs/journal/jvstb/22/3/10.1116/1.1738118
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/3/10.1116/1.1738118
/content/avs/journal/jvstb/22/3/10.1116/1.1738118
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/content/avs/journal/jvstb/22/3/10.1116/1.1738118
2004-06-01
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microelectron field emitter array with focus lenses for multielectron beam lithography based on silicon on insulator wafer
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/3/10.1116/1.1738118
10.1116/1.1738118
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