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Multivariable control of multizone chemical mechanical polishing
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10.1116/1.1761483
/content/avs/journal/jvstb/22/4/10.1116/1.1761483
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/4/10.1116/1.1761483
/content/avs/journal/jvstb/22/4/10.1116/1.1761483
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/content/avs/journal/jvstb/22/4/10.1116/1.1761483
2004-06-30
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multivariable control of multizone chemical mechanical polishing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/4/10.1116/1.1761483
10.1116/1.1761483
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