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Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
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10.1116/1.1776561
/content/avs/journal/jvstb/22/4/10.1116/1.1776561
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/4/10.1116/1.1776561
/content/avs/journal/jvstb/22/4/10.1116/1.1776561
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/content/avs/journal/jvstb/22/4/10.1116/1.1776561
2004-08-17
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/4/10.1116/1.1776561
10.1116/1.1776561
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