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Integration of benzocyclobutene polymers and silicon micromachined structures using anisotropic wet etching
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10.1116/1.1787519
/content/avs/journal/jvstb/22/5/10.1116/1.1787519
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/5/10.1116/1.1787519
/content/avs/journal/jvstb/22/5/10.1116/1.1787519
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/content/avs/journal/jvstb/22/5/10.1116/1.1787519
2004-10-13
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Integration of benzocyclobutene polymers and silicon micromachined structures using anisotropic wet etching
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/5/10.1116/1.1787519
10.1116/1.1787519
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