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Structural and chemical characterization of functional coatings for polymeric lenses
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10.1116/1.1795834
/content/avs/journal/jvstb/22/5/10.1116/1.1795834
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/5/10.1116/1.1795834

Figures

Image of FIG. 1.
FIG. 1.

Schematic drawing of the rf-PECVD deposition system specifically designed for this work.

Image of FIG. 2.
FIG. 2.

Hardcoat layout. Mass flows (oxygen and precursor) and equivalent dilution (HMDSO to ratio) as a function of deposition time. The numbers stand for location of halted depositions performed for analysis purposes: points 1 and 2 belong to the adhesion layer, 3 to the flexibility layer, and 4 to the hardening layer.

Image of FIG. 3.
FIG. 3.

FTIR spectra in the region of the adhesion layer (top), flexibility layer (middle), and hardening layer (bottom).

Image of FIG. 4.
FIG. 4.

Binding energy spectra for (top), (middle), and (bottom) after sputtering, corresponding to the adhesion, flexibility, and hardening layers of the protective coating.

Image of FIG. 5.
FIG. 5.

Graphical representation of carbon, silicon, and oxygen atomic percentages as a function of position inside the multilayer hardcoating structure from XPS analysis.

Image of FIG. 6.
FIG. 6.

(A) RBS spectrum of adhesion layer analysis. (B) Idem for flexibility layer (note overlapping of contiguous energy layers due to the excessive thickness). (C) Idem for hardening layer.

Tables

Generic image for table
TABLE I.

Summary of , and peak quantification for the hard coating detailed in-depth XPS truncated layer analysis. The second column shows the thickness determined by optical measurements.

Generic image for table
TABLE II.

Summary of Si, C, O quantification as obtained in RBS analysis of the same depositions (using graphite), also analyzed by XPS technique. The second column shows the thickness determined by optical measurements.

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/content/avs/journal/jvstb/22/5/10.1116/1.1795834
2004-10-07
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and chemical characterization of functional SiOxCy:H coatings for polymeric lenses
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/5/10.1116/1.1795834
10.1116/1.1795834
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