Scheme of the process. Selective irradiation of an ETFE-Foil with EUV radiation creates radicals in the polymer. Subsequent grafting of polystyrene leads to the growth of a three-dimensional structure.
Optical micrograph of surface structures produced with the micro-/nano-grafting technique.
Dose dependence of the thickness of polystyrene patterns grafted in a 20% styrene solution for , before (straight line) and after (dashed line) treatment with toluene.
(a) Thickness modulation in a period grid pattern produced with interference lithography grafted at high concentration. (b) High resolution image of the same structure.
period pattern (low dose and grafted at low concentration) before and after treatment in toluene.
period structures created with (a) 2 beam and [(b) and (c)] 4 beam interference, respectively. Grafted with 20% styrene, , ; sample treated in toluene.
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