Surface flatness of polycrystalline copper after argon ion etching followed by annealing
Apparatus of argon ion irradiation.
Surface morphologies of polycrystalline copper after oblique injection of argon ion with different angle (left) and after annealing (right).
Height of blisters before and after annealing vs incident angle.
Thermal desorption spectra of argon after argon ion injection with incident angles of 0° and 45° vs heating temperature.
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