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Surface flatness of polycrystalline copper after argon ion etching followed by annealing
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10.1116/1.1814110
/content/avs/journal/jvstb/22/6/10.1116/1.1814110
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/6/10.1116/1.1814110
/content/avs/journal/jvstb/22/6/10.1116/1.1814110
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/content/avs/journal/jvstb/22/6/10.1116/1.1814110
2004-11-04
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface flatness of polycrystalline copper after argon ion etching followed by annealing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/6/10.1116/1.1814110
10.1116/1.1814110
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