Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes
Fabrication process of the 3D wiring and hollow microstructure using FIB-CVD for regenerative nerve electrodes. (a) Deposit tungsten pillars on wiring pattern, using tungsten hexacarbonyl gas, and fabricate the curved carbon tubes connected to tungsten pillars of corresponding channel and did not connect to the other channel’s pillars. (b) Attached guide tubes for regenerating nerve fibers. The axons regenerate from the proximal site to the distal site through the carbon microtube, and active potentials are recorded at the recording site.
Fabrication process of the 3D multimaterial micro/nanostructure by FIB-CVD.
Fabrication process of the prototype of regenerative electrode. (a) Cr was formed with laser patterning and wet-etching process. (b) Tungsten pillars were deposited in gas. (c) Carbon microtubes were attached to tungsten pillars by depositing DLC in gas.
Carbon microtube. (a) The internal diameter was about , and its length was about . The tube was designed as a bent microtube. (b) Cross section of CMT. The tungsten electrode was wired to the carbon tube at the bending point.
Prototype of regenerative electrode. The tungsten pillars were at the end of the chrome wiring, and a carbon-microtube covered the pillars. This carbon-microtube was supported by two diamondlike carbon pillars, which stood on a glass substrate.
Stacked carbon microtube in two layers. The internal diameter was , and the length was .
V-shaped carbon microtube. The internal diameter was , and the length was .
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