Towards intersubband quantum box lasers: Electron-beam lithography update
IQB laser structure. CBM is current blocking material.
Transverse QB structure (Ref. 6), showing the superlattice electron injector and the QW active region.
HSQ : (A) adhesion problem, (B) long-range proximity effect, (C) poor edge definition on pitch lines, (D) partial development, footing on pitch dot array, (E) footing is much less but still present in pitch dot array.
HSQ . Dots are well defined and fully developed. No long range proximity effects; good 30%–50% exposure latitude.
Measured point exposure distribution function with and without intermidiate oxide.
Contrast curves measure on pads.
In situ etch and regrowth of -wide stripes.
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