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Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
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10.1116/1.1824951
/content/avs/journal/jvstb/22/6/10.1116/1.1824951
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/6/10.1116/1.1824951
/content/avs/journal/jvstb/22/6/10.1116/1.1824951
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/content/avs/journal/jvstb/22/6/10.1116/1.1824951
2004-12-14
2014-11-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/22/6/10.1116/1.1824951
10.1116/1.1824951
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