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Mass spectrometry studies of resist trimming processes in and chemistries
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10.1116/1.1839915
/content/avs/journal/jvstb/23/1/10.1116/1.1839915
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/1/10.1116/1.1839915
/content/avs/journal/jvstb/23/1/10.1116/1.1839915
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/content/avs/journal/jvstb/23/1/10.1116/1.1839915
2005-01-05
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mass spectrometry studies of resist trimming processes in HBr∕O2 and Cl2∕O2 chemistries
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/1/10.1116/1.1839915
10.1116/1.1839915
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