Lithographic tuning of photonic-crystal unit-cell resonators with quantum dots emitting at
(a) Design of a PC-UCR. The air hole radius is , where “” is the lattice constant. The nearest holes are retreated from the original lattice point by . Their radii are varied from to . (b) The wafer structure.
Scanning electron microscope image of air holes defined by chemically assisted ion beam etching at the different sample temperatures. (a) 60, (b) 85, (c) . The scale bar in each figure corresponds to .
(a) SEM image of the a PC-UCR. The lattice constant is , the air hole radius is , and the modified air hole radius is . The dashed line indicates the nearest air holes with the modified-hole radius . (b) SEM images of PC-UCRs fabricated using different electron beam dosages during lithography. The scale bar in each figure corresponds to .
Effect of the global change of air holes in PC-UCRs with and without the layer. Dotted lines are with the cladding and solid lines are without it. The design parameters are , , , and . Air holes are (a) enlarged by , (b) enlarged by , and (c) the same as designed.
Lithographic tuning by varying the radius of nearest air holes. (a) , (b) , (c) , (d) . In all cases, and .
Lithographic tuning by varying the lattice constant (a) , (b) , (c) . In all cases, and .
PL spectra of fabricated PC-UCRs with (a) , , and and (b) , , and . In each figure, inset shows the measured polarization.
(a) Photonic band structure of a PC slab with and . (b) Resonance frequencies of monopole, dipole, quadrupole, and hexapole modes, as a funtion of nearest air hole radius where the QD emission band is indicated by solid lines at and .
Measured and the calculated resonance frequencies of the PC-UCR with as a function of . (a) Hexapole mode (b) Quadrupole mode. (c) Monopole mode. In each figure, we compared the two cases, i.e., air holes are as designed and enlarged by 10%.
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