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Lithographic tuning of photonic-crystal unit-cell resonators with quantum dots emitting at
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Design of a PC-UCR. The air hole radius is , where “” is the lattice constant. The nearest holes are retreated from the original lattice point by . Their radii are varied from to . (b) The wafer structure.

Image of FIG. 2.
FIG. 2.

Scanning electron microscope image of air holes defined by chemically assisted ion beam etching at the different sample temperatures. (a) 60, (b) 85, (c) . The scale bar in each figure corresponds to .

Image of FIG. 3.
FIG. 3.

(a) SEM image of the a PC-UCR. The lattice constant is , the air hole radius is , and the modified air hole radius is . The dashed line indicates the nearest air holes with the modified-hole radius . (b) SEM images of PC-UCRs fabricated using different electron beam dosages during lithography. The scale bar in each figure corresponds to .

Image of FIG. 4.
FIG. 4.

Effect of the global change of air holes in PC-UCRs with and without the layer. Dotted lines are with the cladding and solid lines are without it. The design parameters are , , , and . Air holes are (a) enlarged by , (b) enlarged by , and (c) the same as designed.

Image of FIG. 5.
FIG. 5.

Lithographic tuning by varying the radius of nearest air holes. (a) , (b) , (c) , (d) . In all cases, and .

Image of FIG. 6.
FIG. 6.

Lithographic tuning by varying the lattice constant (a) , (b) , (c) . In all cases, and .

Image of FIG. 7.
FIG. 7.

PL spectra of fabricated PC-UCRs with (a) , , and and (b) , , and . In each figure, inset shows the measured polarization.

Image of FIG. 8.
FIG. 8.

(a) Photonic band structure of a PC slab with and . (b) Resonance frequencies of monopole, dipole, quadrupole, and hexapole modes, as a funtion of nearest air hole radius where the QD emission band is indicated by solid lines at and .

Image of FIG. 9.
FIG. 9.

Measured and the calculated resonance frequencies of the PC-UCR with as a function of . (a) Hexapole mode (b) Quadrupole mode. (c) Monopole mode. In each figure, we compared the two cases, i.e., air holes are as designed and enlarged by 10%.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Lithographic tuning of photonic-crystal unit-cell resonators with InGaAs∕GaAs quantum dots emitting at 1.2μm