1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Comparative study of polycrystalline Ti, amorphous Ti, and multiamorphous Ti as a barrier film for Cu interconnect
Rent:
Rent this article for
USD
10.1116/1.1852466
/content/avs/journal/jvstb/23/1/10.1116/1.1852466
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/1/10.1116/1.1852466
/content/avs/journal/jvstb/23/1/10.1116/1.1852466
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvstb/23/1/10.1116/1.1852466
2005-01-14
2014-10-31
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparative study of polycrystalline Ti, amorphous Ti, and multiamorphous Ti as a barrier film for Cu interconnect
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/1/10.1116/1.1852466
10.1116/1.1852466
SEARCH_EXPAND_ITEM