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Investigation of nitrogen flow variation into a radio frequency plasma cell on plasma properties and grown by molecular beam epitaxy
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10.1116/1.1881592
/content/avs/journal/jvstb/23/3/10.1116/1.1881592
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1881592

Figures

Image of FIG. 1.
FIG. 1.

of QWs grown at identical growth rates but different flow rates. Real data are shown in solid lines. A simulation of the sample is shown in a dotted line to help show lack of segregation and relaxation.

Image of FIG. 2.
FIG. 2.

Nitrogen incorporation for different gas flow rates for QWs at the same growth rate. The cracking efficiency is also plotted showing a saturation past .

Image of FIG. 3.
FIG. 3.

Emission wavelength as measured by PL of different gas flow QW samples at different annealing temperatures.

Image of FIG. 4.
FIG. 4.

Peak PL wavelength for different annealing temperatures for the different gas flow samples.

Image of FIG. 5.
FIG. 5.

Langmuir probe measurements of the plasma species exiting the cell with different gas flows.

Tables

Generic image for table
TABLE I.

Summary of the growth conditions for the samples described in this study. The gallium and indium growth rates for the three growth rate conditions are listed. Checkmarks represent the samples which were grown with the designated growth rates and nitrogen gas flows.

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/content/avs/journal/jvstb/23/3/10.1116/1.1881592
2005-06-13
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of nitrogen flow variation into a radio frequency plasma cell on plasma properties and GaInNAs grown by molecular beam epitaxy
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1881592
10.1116/1.1881592
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