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GaAs buffer layer morphology and lateral distributions of InGaAs quantum dots
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10.1116/1.1900729
/content/avs/journal/jvstb/23/3/10.1116/1.1900729
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1900729

Figures

Image of FIG. 1.
FIG. 1.

Schematic showing the positions of the 81 analysis points used to generate maps of the QD density and height, relative to the edges and major flat on the wafers. The circled points are those analyzed on buffer layer samples to determine the sample rms roughness, .

Image of FIG. 2.
FIG. 2.

AFM images of the three different buffer types studied: (a) pulsed start, (b) continuous, and (c) annealed. The images are all .

Image of FIG. 3.
FIG. 3.

AFM images of substrates with the three different buffer types, which have undergone an additional cooling to and hold at : (a) pulsed start, (b) continuous, and (c) annealed. AFM images from the center of each wafer with QDs grown on the three different types of buffer: (d) pulsed start, (e) continuous, and (f) annealed. The images are all .

Image of FIG. 4.
FIG. 4.

Contour plots of the QD density on the three different buffers: (a) pulsed start, (b) continuous, and (c) annealed, and of the QD height (nm): (d) pulsed start, (e) continuous, and (f) annealed.

Tables

Generic image for table
TABLE I.

Buffer layer feature dimensions and step edge line intercepts.

Generic image for table
TABLE II.

Buffer layer roughness, (nm)

Generic image for table
TABLE III.

Average quantum dot density, height and .

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/content/avs/journal/jvstb/23/3/10.1116/1.1900729
2005-06-09
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: GaAs buffer layer morphology and lateral distributions of InGaAs quantum dots
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1900729
10.1116/1.1900729
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