GaAs buffer layer morphology and lateral distributions of InGaAs quantum dots
Schematic showing the positions of the 81 analysis points used to generate maps of the QD density and height, relative to the edges and major flat on the wafers. The circled points are those analyzed on buffer layer samples to determine the sample rms roughness, .
AFM images of the three different buffer types studied: (a) pulsed start, (b) continuous, and (c) annealed. The images are all .
AFM images of substrates with the three different buffer types, which have undergone an additional cooling to and hold at : (a) pulsed start, (b) continuous, and (c) annealed. AFM images from the center of each wafer with QDs grown on the three different types of buffer: (d) pulsed start, (e) continuous, and (f) annealed. The images are all .
Contour plots of the QD density on the three different buffers: (a) pulsed start, (b) continuous, and (c) annealed, and of the QD height (nm): (d) pulsed start, (e) continuous, and (f) annealed.
Buffer layer feature dimensions and step edge line intercepts.
Buffer layer roughness, (nm)
Average quantum dot density, height and .
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