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Micro∕nanotribological study of perfluorosilane SAMs for antistiction and low wear
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10.1116/1.1913674
/content/avs/journal/jvstb/23/3/10.1116/1.1913674
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1913674

Figures

Image of FIG. 1.
FIG. 1.

Chemical structure of perfluoroalkylsilane and alkylsilane films deposited on Si with native oxide and substrates.

Image of FIG. 2.
FIG. 2.

(a) Zisman plots for PFTS∕Si, ODMS∕Si, ODDMS∕Si, , , and used for calculating critical surface tension, a measure of surface energy, which is given by the intercept of the fitted line to the data; summary of the data; and (b) water contact angle for a series of SAMs on Si and .

Image of FIG. 3.
FIG. 3.

Rms roughness, adhesive force, and coefficient of friction measured by an AFM for a series of SAMs on Si and .

Image of FIG. 4.
FIG. 4.

A schematic showing an AFM tip sliding on SAMs that can act as molecular spring. In this figure, , which is caused by the further orientation under the normal load applied by the AFM tip.

Image of FIG. 5.
FIG. 5.

Microscale wear evaluation done by measuring wear depth at given normal loads for Si, PFTS∕Si, ODMS∕Si, ODDMS∕Si, and hexadecane thiol∕Au. Critical normal loads can be observed for the SAM samples.

Image of FIG. 6.
FIG. 6.

Relative humidity dependency on adhesive force, friction force, coefficient of friction, and microwear for Si, PFTS∕Si, ODMS∕Si, and ODDMS∕Si.

Image of FIG. 7.
FIG. 7.

Temperature dependency on adhesive force, friction force, and coefficient of friction for Si, PFTS∕Si, ODMS∕Si, and ODDMS∕Si.

Image of FIG. 8.
FIG. 8.

Sliding velocity effect on adhesive force, friction force, and coefficient of friction for Si, PFTS∕Si, ODMS∕Si, and ODDMS∕Si.

Tables

Generic image for table
TABLE I.

Typical bond strengths in SAMs.

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/content/avs/journal/jvstb/23/3/10.1116/1.1913674
2005-05-20
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micro∕nanotribological study of perfluorosilane SAMs for antistiction and low wear
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1913674
10.1116/1.1913674
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